Field Service Engineer

Oxford Instruments plc

Field Service Engineer installing, maintaining, and troubleshooting Oxford Instruments plasma etch and deposition systems. Supporting semiconductor customers across North America through technical service, training, and extensive travel.

Posted 8/5/2026full-timeRemote • District of Columbia, Massachusetts • 🇺🇸 United StatesMid-LevelSenior💰 $100,000 - $120,000 per yearWebsite

Core Competencies

Role fit

Core Competencies

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Demonstrates expertise in technical support, installation, and maintenance of plasma etch and deposition systems, with a strong focus on troubleshooting and optimizing performance. Proficient in collaborating across teams and building customer relationships while adhering to cleanroom operations and safety protocols.

Highest-signal resume keywords

Plasma Etch And Deposition SystemsField Service ExperienceRF Power ComponentsVacuum Leak DetectorsCleanroom Operations

ATS Keywords

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Applicant Tracking System Keywords

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Hard Skills

Electrical EngineeringMechanical EngineeringTroubleshooting 208V Electrical SystemsCalibration Of AMUsCalibration Of RF GeneratorsCalibration Of APCsCalibration Of MFCsUnderstanding Of RF TheoryReading Mechanical SchematicsExperience With Turbo Pumps

Soft Skills

Effective CommunicationTeamworkAdaptabilityContinuous LearningIndependent Work

Tools & Technologies

Vacuum Leak DetectorsRF Power MetersDVMsLCR MetersMultimetersMegohm MetersBrooks PlatformsPfeiffer/Edwards Pumping SystemsMKS ComponentsTurbo Pumps

Certifications & Qualifications

Bachelor’s Degree In Electrical EngineeringBachelor’s Degree In Mechanical EngineeringBachelor’s Degree In PhysicsValid Driver’s LicensePassport

Industry Keywords

Semiconductor IndustryCleanroom OperationsPlasma Etch ProcessesPECVDRIEICPALDField ServicePreventive MaintenanceCorrective Maintenance

About the role

Key responsibilities & impact

Represent Oxford Instruments by delivering technical support, installation, and maintenance for plasma etch and deposition systems
Lead installation and commissioning of advanced plasma etch and deposition systems
Execute scheduled and emergency preventive and corrective maintenance
Diagnose root causes and validate repairs against vacuum, leak-up, and process benchmarks
Build customer relationships through responsive communication and hands-on technical training
Troubleshoot complex hardware and software issues using specialized diagnostic tools
Provide remote support to minimize downtime and maximize uptime
Calibrate critical components including AMUs, RF Generators, APCs, and MFCs
Implement performance-enhancing system upgrades including turbo pumps, PLCs, and breakers
Collaborate across teams, escalate issues when needed, and maintain detailed documentation
Travel extensively to customer sites for installations and service needs Monday through Friday

Requirements

What you’ll need

Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field
Equivalent hands-on experience in semiconductor equipment service may substitute for the degree
5–7 years of field service experience in the semiconductor industry, focused on plasma etch and deposition systems
Familiarity with cleanroom operations and safety protocols
Hands-on experience with turbo pumps, cryo pumps, and roughing pumps
Experience troubleshooting 208V electrical systems and 24V control subsystems
Extensive experience with RF power components and pneumatically driven systems
Proficiency with vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, and megohm meters
Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams
Strong understanding of RF theory and inductively coupled plasma (ICP) systems
Familiarity with RIE, PECVD, ICP, and ALD semiconductor processes
Valid driver’s license, safe driving record, and passport
Ability to travel independently and extensively on weekdays, Monday through Friday
Physical agility and comfort working in confined or awkward spaces
Ability to lift and handle equipment weighing up to 50 lbs
Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components preferred
Knowledge of APC and MFC calibration and optimization preferred
Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire
Effective communication, listening, independent work, teamwork, adaptability, and continuous-learning capabilities

Benefits

Comp & perks

Full-time, benefited position
Salary range of $100,000–$120,000
Remote work arrangement
Professional exposure to cutting-edge semiconductor technologies
Customer and technical training opportunities
Travel to customer sites